Application of nano porous silicon for gas detection

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GHELLAI.pdf (55.47 KB)

Date

2012

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Abstract

pourous silicon (SiP) is obtained by anodic attack of single-crystal silicon in concentrated hydrofluoric acid solution

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porous silicon, gas, sensor, detector

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https://dspace.univ-tlemcen.dz/handle/112/1512

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Communications internationales