Dr Abdellah, Benyoucef2013-02-182013-02-182013-02-18https://dspace.univ-tlemcen.dz/handle/112/1440titanuim dioxide thin films in anatase phase with columnar morphology have been reactively sputter deposited on glass slides and ITO substrates at high deposition rates (15-30 nm/min)using plasma emission monitoring system(PEM).Thus ,oxygen flow rate has been monitored in order to keep ti emission signal at 20% from those obtained in a pure argon discharge..